SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications

Konferenzbeitrag › Konferenzpaper › 2014

Zitation

Ngo, Ha-Duong; Giuliani, Andrea; Drera, Lionello; Arancio, Domenico; Mukhopadhyay, Biswaijit: SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications. In: Procedia Engineering. Hg. von Elsevier. Brescia, Italien: 2014( Volume 87 (2014)), S. 720–723.

ISSN

1877-7058

Link

http://dx.doi.org/10.1016/j.proeng.2014.11.639

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