WSi-WSiN-Pt metallization scheme for Silicon Carbide Based high temperature Microsystems

Artikel › Journalartikel › 2016

Zitation

Ngo, Ha Duong; Mukhopadhyay, Biswaijit; Mackowiak, Piotr; Kröhnert, Kevin; Ehrmann, Oswin; Lang, Klaus-Dieter: WSi-WSiN-Pt metallization scheme for Silicon Carbide Based high temperature Microsystems. In: Journal os Micromachines Vol. 7, Issue 10. (2016), S. 1-9.

ISSN

2072-666X

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