Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications
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› 2018
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Ngo, Ha Duong; Mackowiak, Piotr; Abdallah, Rachid; Wilke, Martin; Patel, Jash; Ashraf, Huma; Buchanan, Keith; Lang, Klaus-Dieter; Schneider-Ramelow, Martin: Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications. In: 51st International Symposium on Microelectronics. Pasadena, USA: iMAPS 2018, S. 1-7.