Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells
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› 2019
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Morales-Vilches, Anna Belen; Wang, Er-Chien; Henschel, Tobias; Kubicki, Matthias; Cruz, Alexandros; Janke, Stefan; Korte, Lars; Schlatmann, Rutger; Stannowski, Bernd: Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells. In: physica status solidi (a) 06 December 2019. (2019), S. 1900518 (1-7).