Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate
Konferenzbeitrag › Konferenzpaper
› 2022
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Konferenzbeitrag Full Paper
Ngo, Ha Duong; Erbacher, Kolja; AlvesMarques, Joao; von Krshiwoblozki: Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate. In: EPTC Advanced Packaging. Singapore: IEEE 2022, S. 1-4.