PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY
Konferenzbeitrag › Konferenzpaper
› 2023
Zitation
Konferenzbeitrag Full Paper
Bickel, Jan; Gesche, Roland; Fieber, Martin; Scherer, Joachim; Kovacs, Reinhold; Hu, Xiaodong; Ngo, Ha Duong: PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY. In: Trasducers 2023. Kyoto, Japan: 2023, S. 1-4.