HIpIms in full face erosion Circular Cathode for semiconductor Application. Best Paper Award Interactive
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Papa, F.; Li, H.; Azzopardi, A.; Brindley, J.; Vetushka, A.; Bellido-Gonzalez, Victor; Fernandez, I.; Wennberg, A.; Ngo, Ha Duong: HIpIms in full face erosion Circular Cathode for semiconductor Application. Best Paper Award Interactive. . Braunschweig: 2015, S. 200-204.
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HIPIMS in Full Face Erosion Circular Cathode Semiconductor Applications
EPTC
Singapure, 02.12.2015Veranstaltungsbeitrag › Vortrag › 2015